1/25/2011	1:58:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/25/2011	1:58:12 AM	Recipe started at 1:58 AM
1/25/2011	1:58:12 AM	Helium valve closed
1/25/2011	1:58:12 AM	H2 valve closed
1/25/2011	1:58:12 AM	BCl3 valve closed
1/25/2011	1:58:12 AM	PH3 valve closed
1/25/2011	1:58:12 AM	SiCl4 pre valve closed
1/25/2011	1:58:12 AM	SiCl4 post valve closed
1/25/2011	1:58:12 AM	Main Vac valve closed
1/25/2011	1:58:12 AM	Bubbler valve closed
1/25/2011	1:58:12 AM	Bypass valve opened
1/25/2011	1:58:12 AM	Helium MFC set to  0.000000
1/25/2011	1:58:12 AM	H2 MFC set to  0.000000
1/25/2011	1:58:12 AM	BCl3 MFC set to  0.000000
1/25/2011	1:58:12 AM	PHl3 MFC set to  0.000000
1/25/2011	1:58:12 AM	SiCl4 MFC set to  0.000000
1/25/2011	1:58:12 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	1:58:13 AM	Tube furnace set to 0
1/25/2011	1:59:07 AM	Helium valve closed
1/25/2011	1:59:07 AM	H2 valve closed
1/25/2011	1:59:07 AM	BCl3 valve closed
1/25/2011	1:59:07 AM	PH3 valve closed
1/25/2011	1:59:07 AM	SiCl4 pre valve closed
1/25/2011	1:59:07 AM	SiCl4 post valve closed
1/25/2011	1:59:07 AM	Bubbler valve closed
1/25/2011	1:59:07 AM	Main Vac valve opened
1/25/2011	1:59:07 AM	Bypass valve opened
1/25/2011	1:59:07 AM	Helium MFC set to  0.000000
1/25/2011	1:59:07 AM	H2 MFC set to  0.000000
1/25/2011	1:59:07 AM	BCl3 MFC set to  0.000000
1/25/2011	1:59:07 AM	PHl3 MFC set to  0.000000
1/25/2011	1:59:07 AM	SiCl4 MFC set to  0.000000
1/25/2011	1:59:07 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	1:59:08 AM	Tube furnace set to 0
1/25/2011	1:59:08 AM	Run finished at 1:59 AM
1/25/2011	1:59:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/25/2011	2:13:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/25/2011	2:14:01 AM	Recipe started at 2:13 AM
1/25/2011	2:14:01 AM	Helium valve closed
1/25/2011	2:14:01 AM	H2 valve closed
1/25/2011	2:14:01 AM	BCl3 valve closed
1/25/2011	2:14:01 AM	PH3 valve closed
1/25/2011	2:14:01 AM	SiCl4 pre valve closed
1/25/2011	2:14:01 AM	SiCl4 post valve closed
1/25/2011	2:14:01 AM	Main Vac valve closed
1/25/2011	2:14:01 AM	Bubbler valve closed
1/25/2011	2:14:01 AM	Bypass valve opened
1/25/2011	2:14:01 AM	Helium MFC set to  0.000000
1/25/2011	2:14:01 AM	H2 MFC set to  0.000000
1/25/2011	2:14:01 AM	BCl3 MFC set to  0.000000
1/25/2011	2:14:01 AM	PHl3 MFC set to  0.000000
1/25/2011	2:14:01 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:14:01 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:14:01 AM	Tube furnace set to 0
1/25/2011	2:14:02 AM	Helium valve closed
1/25/2011	2:14:02 AM	H2 valve closed
1/25/2011	2:14:02 AM	BCl3 valve closed
1/25/2011	2:14:02 AM	PH3 valve closed
1/25/2011	2:14:02 AM	SiCl4 pre valve closed
1/25/2011	2:14:02 AM	SiCl4 post valve closed
1/25/2011	2:14:02 AM	Bubbler valve closed
1/25/2011	2:14:02 AM	Main Vac valve opened
1/25/2011	2:14:02 AM	Bypass valve opened
1/25/2011	2:14:02 AM	Helium MFC set to  0.000000
1/25/2011	2:14:02 AM	H2 MFC set to  0.000000
1/25/2011	2:14:02 AM	BCl3 MFC set to  0.000000
1/25/2011	2:14:02 AM	PHl3 MFC set to  0.000000
1/25/2011	2:14:02 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:14:02 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:14:02 AM	Tube furnace set to 0
1/25/2011	2:15:02 AM	H2 valve closed
1/25/2011	2:15:02 AM	BCl3 valve closed
1/25/2011	2:15:02 AM	PH3 valve closed
1/25/2011	2:15:02 AM	SiCl4 pre valve closed
1/25/2011	2:15:02 AM	SiCl4 post valve closed
1/25/2011	2:15:02 AM	Bubbler valve closed
1/25/2011	2:15:02 AM	Helium valve opened
1/25/2011	2:15:02 AM	Main Vac valve opened
1/25/2011	2:15:02 AM	Bypass valve opened
1/25/2011	2:15:02 AM	Helium MFC set to  100.000000
1/25/2011	2:15:02 AM	H2 MFC set to  0.000000
1/25/2011	2:15:02 AM	BCl3 MFC set to  0.000000
1/25/2011	2:15:02 AM	PHl3 MFC set to  0.000000
1/25/2011	2:15:02 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:15:02 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:15:02 AM	Tube furnace set to 0
1/25/2011	2:16:02 AM	Helium valve closed
1/25/2011	2:16:02 AM	H2 valve closed
1/25/2011	2:16:02 AM	BCl3 valve closed
1/25/2011	2:16:02 AM	PH3 valve closed
1/25/2011	2:16:02 AM	SiCl4 pre valve closed
1/25/2011	2:16:02 AM	SiCl4 post valve closed
1/25/2011	2:16:02 AM	Bubbler valve closed
1/25/2011	2:16:02 AM	Main Vac valve opened
1/25/2011	2:16:02 AM	Bypass valve opened
1/25/2011	2:16:02 AM	Helium MFC set to  0.000000
1/25/2011	2:16:02 AM	H2 MFC set to  0.000000
1/25/2011	2:16:02 AM	BCl3 MFC set to  0.000000
1/25/2011	2:16:02 AM	PHl3 MFC set to  0.000000
1/25/2011	2:16:02 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:16:02 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:16:02 AM	Tube furnace set to 0
1/25/2011	2:17:02 AM	H2 valve closed
1/25/2011	2:17:02 AM	BCl3 valve closed
1/25/2011	2:17:02 AM	PH3 valve closed
1/25/2011	2:17:02 AM	SiCl4 pre valve closed
1/25/2011	2:17:02 AM	SiCl4 post valve closed
1/25/2011	2:17:02 AM	Bubbler valve closed
1/25/2011	2:17:02 AM	Helium valve opened
1/25/2011	2:17:02 AM	Main Vac valve opened
1/25/2011	2:17:02 AM	Bypass valve opened
1/25/2011	2:17:02 AM	Helium MFC set to  100.000000
1/25/2011	2:17:02 AM	H2 MFC set to  0.000000
1/25/2011	2:17:02 AM	BCl3 MFC set to  0.000000
1/25/2011	2:17:02 AM	PHl3 MFC set to  0.000000
1/25/2011	2:17:02 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:17:02 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:17:03 AM	Tube furnace set to 0
1/25/2011	2:18:03 AM	Helium valve closed
1/25/2011	2:18:03 AM	H2 valve closed
1/25/2011	2:18:03 AM	BCl3 valve closed
1/25/2011	2:18:03 AM	PH3 valve closed
1/25/2011	2:18:03 AM	SiCl4 pre valve closed
1/25/2011	2:18:03 AM	SiCl4 post valve closed
1/25/2011	2:18:03 AM	Bubbler valve closed
1/25/2011	2:18:03 AM	Main Vac valve opened
1/25/2011	2:18:03 AM	Bypass valve opened
1/25/2011	2:18:03 AM	Helium MFC set to  0.000000
1/25/2011	2:18:03 AM	H2 MFC set to  0.000000
1/25/2011	2:18:03 AM	BCl3 MFC set to  0.000000
1/25/2011	2:18:03 AM	PHl3 MFC set to  0.000000
1/25/2011	2:18:03 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:18:03 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:18:03 AM	Tube furnace set to 0
1/25/2011	2:19:03 AM	H2 valve closed
1/25/2011	2:19:03 AM	BCl3 valve closed
1/25/2011	2:19:03 AM	PH3 valve closed
1/25/2011	2:19:03 AM	SiCl4 pre valve closed
1/25/2011	2:19:03 AM	SiCl4 post valve closed
1/25/2011	2:19:03 AM	Bubbler valve closed
1/25/2011	2:19:03 AM	Helium valve opened
1/25/2011	2:19:03 AM	Main Vac valve opened
1/25/2011	2:19:03 AM	Bypass valve opened
1/25/2011	2:19:03 AM	Helium MFC set to  100.000000
1/25/2011	2:19:03 AM	H2 MFC set to  0.000000
1/25/2011	2:19:03 AM	BCl3 MFC set to  0.000000
1/25/2011	2:19:03 AM	PHl3 MFC set to  0.000000
1/25/2011	2:19:03 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:19:03 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:19:03 AM	Tube furnace set to 0
1/25/2011	2:20:03 AM	Helium valve closed
1/25/2011	2:20:03 AM	H2 valve closed
1/25/2011	2:20:03 AM	BCl3 valve closed
1/25/2011	2:20:03 AM	PH3 valve closed
1/25/2011	2:20:03 AM	SiCl4 pre valve closed
1/25/2011	2:20:03 AM	SiCl4 post valve closed
1/25/2011	2:20:03 AM	Bubbler valve closed
1/25/2011	2:20:03 AM	Main Vac valve opened
1/25/2011	2:20:03 AM	Bypass valve opened
1/25/2011	2:20:03 AM	Helium MFC set to  0.000000
1/25/2011	2:20:03 AM	H2 MFC set to  0.000000
1/25/2011	2:20:03 AM	BCl3 MFC set to  0.000000
1/25/2011	2:20:03 AM	PHl3 MFC set to  0.000000
1/25/2011	2:20:03 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:20:03 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:20:03 AM	Tube furnace set to 0
1/25/2011	2:21:03 AM	H2 valve closed
1/25/2011	2:21:03 AM	BCl3 valve closed
1/25/2011	2:21:03 AM	PH3 valve closed
1/25/2011	2:21:03 AM	SiCl4 pre valve closed
1/25/2011	2:21:03 AM	SiCl4 post valve closed
1/25/2011	2:21:03 AM	Bubbler valve closed
1/25/2011	2:21:03 AM	Helium valve opened
1/25/2011	2:21:03 AM	Main Vac valve opened
1/25/2011	2:21:03 AM	Bypass valve opened
1/25/2011	2:21:03 AM	Helium MFC set to  100.000000
1/25/2011	2:21:03 AM	H2 MFC set to  0.000000
1/25/2011	2:21:03 AM	BCl3 MFC set to  0.000000
1/25/2011	2:21:03 AM	PHl3 MFC set to  0.000000
1/25/2011	2:21:03 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:21:03 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:21:03 AM	Tube furnace set to 0
1/25/2011	2:22:03 AM	Helium valve closed
1/25/2011	2:22:03 AM	H2 valve closed
1/25/2011	2:22:03 AM	BCl3 valve closed
1/25/2011	2:22:03 AM	PH3 valve closed
1/25/2011	2:22:03 AM	SiCl4 pre valve closed
1/25/2011	2:22:03 AM	SiCl4 post valve closed
1/25/2011	2:22:03 AM	Bubbler valve closed
1/25/2011	2:22:03 AM	Main Vac valve opened
1/25/2011	2:22:03 AM	Bypass valve opened
1/25/2011	2:22:03 AM	Helium MFC set to  0.000000
1/25/2011	2:22:03 AM	H2 MFC set to  0.000000
1/25/2011	2:22:03 AM	BCl3 MFC set to  0.000000
1/25/2011	2:22:03 AM	PHl3 MFC set to  0.000000
1/25/2011	2:22:03 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:22:04 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:22:04 AM	Tube furnace set to 0
1/25/2011	2:23:04 AM	H2 valve closed
1/25/2011	2:23:04 AM	BCl3 valve closed
1/25/2011	2:23:04 AM	PH3 valve closed
1/25/2011	2:23:04 AM	SiCl4 pre valve closed
1/25/2011	2:23:04 AM	SiCl4 post valve closed
1/25/2011	2:23:04 AM	Bubbler valve closed
1/25/2011	2:23:04 AM	Helium valve opened
1/25/2011	2:23:04 AM	Main Vac valve opened
1/25/2011	2:23:04 AM	Bypass valve opened
1/25/2011	2:23:04 AM	Helium MFC set to  100.000000
1/25/2011	2:23:04 AM	H2 MFC set to  0.000000
1/25/2011	2:23:04 AM	BCl3 MFC set to  0.000000
1/25/2011	2:23:04 AM	PHl3 MFC set to  0.000000
1/25/2011	2:23:04 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:23:04 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:23:04 AM	Tube furnace set to 0
1/25/2011	2:24:04 AM	Helium valve closed
1/25/2011	2:24:04 AM	H2 valve closed
1/25/2011	2:24:04 AM	BCl3 valve closed
1/25/2011	2:24:04 AM	PH3 valve closed
1/25/2011	2:24:04 AM	SiCl4 pre valve closed
1/25/2011	2:24:04 AM	SiCl4 post valve closed
1/25/2011	2:24:04 AM	Bubbler valve closed
1/25/2011	2:24:04 AM	Main Vac valve opened
1/25/2011	2:24:04 AM	Bypass valve opened
1/25/2011	2:24:04 AM	Helium MFC set to  0.000000
1/25/2011	2:24:04 AM	H2 MFC set to  0.000000
1/25/2011	2:24:04 AM	BCl3 MFC set to  0.000000
1/25/2011	2:24:04 AM	PHl3 MFC set to  0.000000
1/25/2011	2:24:04 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:24:04 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:24:04 AM	Tube furnace set to 0
1/25/2011	2:24:32 AM	Run aborted at 2:24 AM
1/25/2011	2:24:32 AM	Helium valve closed
1/25/2011	2:24:32 AM	H2 valve closed
1/25/2011	2:24:32 AM	BCl3 valve closed
1/25/2011	2:24:32 AM	PH3 valve closed
1/25/2011	2:24:32 AM	SiCl4 pre valve closed
1/25/2011	2:24:32 AM	SiCl4 post valve closed
1/25/2011	2:24:32 AM	Bypass valve closed
1/25/2011	2:24:32 AM	Main Vac valve closed
1/25/2011	2:24:32 AM	Bubbler valve closed
1/25/2011	2:24:32 AM	Helium MFC set to  0.000000
1/25/2011	2:24:32 AM	H2 MFC set to  0.000000
1/25/2011	2:24:32 AM	BCl3 MFC set to  0.000000
1/25/2011	2:24:32 AM	PHl3 MFC set to  0.000000
1/25/2011	2:24:32 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:24:32 AM	Tube furnace set to 0
1/25/2011	2:24:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/25/2011	2:24:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/25/2011	2:24:35 AM	Recipe started at 2:24 AM
1/25/2011	2:24:35 AM	Helium valve closed
1/25/2011	2:24:35 AM	H2 valve closed
1/25/2011	2:24:35 AM	BCl3 valve closed
1/25/2011	2:24:35 AM	PH3 valve closed
1/25/2011	2:24:35 AM	SiCl4 pre valve closed
1/25/2011	2:24:35 AM	SiCl4 post valve closed
1/25/2011	2:24:35 AM	Main Vac valve closed
1/25/2011	2:24:35 AM	Bubbler valve closed
1/25/2011	2:24:36 AM	Bypass valve opened
1/25/2011	2:24:36 AM	Helium MFC set to  0.000000
1/25/2011	2:24:36 AM	H2 MFC set to  0.000000
1/25/2011	2:24:36 AM	BCl3 MFC set to  0.000000
1/25/2011	2:24:36 AM	PHl3 MFC set to  0.000000
1/25/2011	2:24:36 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:24:36 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:24:36 AM	Tube furnace set to 0
1/25/2011	2:24:36 AM	Helium valve closed
1/25/2011	2:24:36 AM	H2 valve closed
1/25/2011	2:24:36 AM	BCl3 valve closed
1/25/2011	2:24:36 AM	PH3 valve closed
1/25/2011	2:24:36 AM	SiCl4 pre valve closed
1/25/2011	2:24:36 AM	SiCl4 post valve closed
1/25/2011	2:24:36 AM	Bubbler valve closed
1/25/2011	2:24:36 AM	Main Vac valve opened
1/25/2011	2:24:36 AM	Bypass valve opened
1/25/2011	2:24:36 AM	Helium MFC set to  0.000000
1/25/2011	2:24:36 AM	H2 MFC set to  0.000000
1/25/2011	2:24:36 AM	BCl3 MFC set to  0.000000
1/25/2011	2:24:36 AM	PHl3 MFC set to  0.000000
1/25/2011	2:24:36 AM	SiCl4 MFC set to  0.000000
1/25/2011	2:24:36 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	2:24:36 AM	Tube furnace set to 0
1/25/2011	2:24:36 AM	Run finished at 2:24 AM
1/25/2011	2:24:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/25/2011	9:54:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/25/2011	9:54:49 AM	Recipe started at 9:54 AM
1/25/2011	9:54:49 AM	H2 valve closed
1/25/2011	9:54:49 AM	BCl3 valve closed
1/25/2011	9:54:49 AM	PH3 valve closed
1/25/2011	9:54:49 AM	SiCl4 pre valve closed
1/25/2011	9:54:49 AM	SiCl4 post valve closed
1/25/2011	9:54:49 AM	Main Vac valve closed
1/25/2011	9:54:49 AM	Bypass valve closed
1/25/2011	9:54:49 AM	Bubbler valve closed
1/25/2011	9:54:49 AM	Helium valve opened
1/25/2011	9:54:49 AM	Helium MFC set to  500.000000
1/25/2011	9:54:49 AM	H2 MFC set to  0.000000
1/25/2011	9:54:49 AM	BCl3 MFC set to  0.000000
1/25/2011	9:54:49 AM	PHl3 MFC set to  0.000000
1/25/2011	9:54:49 AM	SiCl4 MFC set to  0.000000
1/25/2011	9:54:49 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	9:54:49 AM	Tube furnace set to 0
1/25/2011	9:56:05 AM	Helium valve closed
1/25/2011	9:56:05 AM	H2 valve closed
1/25/2011	9:56:05 AM	BCl3 valve closed
1/25/2011	9:56:05 AM	PH3 valve closed
1/25/2011	9:56:05 AM	SiCl4 pre valve closed
1/25/2011	9:56:05 AM	SiCl4 post valve closed
1/25/2011	9:56:05 AM	Main Vac valve closed
1/25/2011	9:56:05 AM	Bypass valve closed
1/25/2011	9:56:05 AM	Bubbler valve closed
1/25/2011	9:56:05 AM	Helium MFC set to  0.000000
1/25/2011	9:56:05 AM	H2 MFC set to  0.000000
1/25/2011	9:56:05 AM	BCl3 MFC set to  0.000000
1/25/2011	9:56:05 AM	PHl3 MFC set to  0.000000
1/25/2011	9:56:05 AM	SiCl4 MFC set to  0.000000
1/25/2011	9:56:05 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	9:56:05 AM	Tube furnace set to 0
1/25/2011	9:56:06 AM	Run finished at 9:56 AM
1/25/2011	9:56:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/25/2011	10:10:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/25/2011	10:10:53 AM	Recipe started at 10:10 AM
1/25/2011	10:10:53 AM	Helium valve closed
1/25/2011	10:10:53 AM	H2 valve closed
1/25/2011	10:10:53 AM	BCl3 valve closed
1/25/2011	10:10:53 AM	PH3 valve closed
1/25/2011	10:10:53 AM	SiCl4 pre valve closed
1/25/2011	10:10:53 AM	SiCl4 post valve closed
1/25/2011	10:10:53 AM	Main Vac valve closed
1/25/2011	10:10:53 AM	Bubbler valve closed
1/25/2011	10:10:53 AM	Bypass valve opened
1/25/2011	10:10:53 AM	Helium MFC set to  0.000000
1/25/2011	10:10:53 AM	H2 MFC set to  0.000000
1/25/2011	10:10:53 AM	BCl3 MFC set to  0.000000
1/25/2011	10:10:53 AM	PHl3 MFC set to  0.000000
1/25/2011	10:10:53 AM	SiCl4 MFC set to  0.000000
1/25/2011	10:10:53 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	10:10:53 AM	Tube furnace set to 0
1/25/2011	10:11:34 AM	Helium valve closed
1/25/2011	10:11:34 AM	H2 valve closed
1/25/2011	10:11:34 AM	BCl3 valve closed
1/25/2011	10:11:34 AM	PH3 valve closed
1/25/2011	10:11:34 AM	SiCl4 pre valve closed
1/25/2011	10:11:34 AM	SiCl4 post valve closed
1/25/2011	10:11:34 AM	Bubbler valve closed
1/25/2011	10:11:34 AM	Main Vac valve opened
1/25/2011	10:11:34 AM	Bypass valve opened
1/25/2011	10:11:34 AM	Helium MFC set to  0.000000
1/25/2011	10:11:34 AM	H2 MFC set to  0.000000
1/25/2011	10:11:34 AM	BCl3 MFC set to  0.000000
1/25/2011	10:11:34 AM	PHl3 MFC set to  0.000000
1/25/2011	10:11:34 AM	SiCl4 MFC set to  0.000000
1/25/2011	10:11:34 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	10:11:34 AM	Tube furnace set to 0
1/25/2011	10:11:35 AM	Run finished at 10:11 AM
1/25/2011	10:11:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/25/2011	10:16:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/25/2011	10:16:40 AM	Recipe started at 10:16 AM
1/25/2011	10:16:40 AM	H2 valve closed
1/25/2011	10:16:40 AM	BCl3 valve closed
1/25/2011	10:16:40 AM	PH3 valve closed
1/25/2011	10:16:40 AM	SiCl4 pre valve closed
1/25/2011	10:16:40 AM	SiCl4 post valve closed
1/25/2011	10:16:40 AM	Main Vac valve closed
1/25/2011	10:16:40 AM	Bypass valve closed
1/25/2011	10:16:40 AM	Bubbler valve closed
1/25/2011	10:16:40 AM	Helium valve opened
1/25/2011	10:16:40 AM	Helium MFC set to  500.000000
1/25/2011	10:16:40 AM	H2 MFC set to  0.000000
1/25/2011	10:16:40 AM	BCl3 MFC set to  0.000000
1/25/2011	10:16:40 AM	PHl3 MFC set to  0.000000
1/25/2011	10:16:40 AM	SiCl4 MFC set to  0.000000
1/25/2011	10:16:40 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	10:16:41 AM	Tube furnace set to 0
1/25/2011	10:18:01 AM	Helium valve closed
1/25/2011	10:18:01 AM	H2 valve closed
1/25/2011	10:18:01 AM	BCl3 valve closed
1/25/2011	10:18:01 AM	PH3 valve closed
1/25/2011	10:18:01 AM	SiCl4 pre valve closed
1/25/2011	10:18:01 AM	SiCl4 post valve closed
1/25/2011	10:18:01 AM	Main Vac valve closed
1/25/2011	10:18:01 AM	Bypass valve closed
1/25/2011	10:18:01 AM	Bubbler valve closed
1/25/2011	10:18:01 AM	Helium MFC set to  0.000000
1/25/2011	10:18:01 AM	H2 MFC set to  0.000000
1/25/2011	10:18:01 AM	BCl3 MFC set to  0.000000
1/25/2011	10:18:01 AM	PHl3 MFC set to  0.000000
1/25/2011	10:18:01 AM	SiCl4 MFC set to  0.000000
1/25/2011	10:18:01 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	10:18:01 AM	Tube furnace set to 0
1/25/2011	10:18:01 AM	Run finished at 10:18 AM
1/25/2011	10:18:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/25/2011	10:19:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/25/2011	10:19:21 AM	Recipe started at 10:19 AM
1/25/2011	10:19:21 AM	Helium valve closed
1/25/2011	10:19:21 AM	H2 valve closed
1/25/2011	10:19:21 AM	BCl3 valve closed
1/25/2011	10:19:21 AM	PH3 valve closed
1/25/2011	10:19:21 AM	SiCl4 pre valve closed
1/25/2011	10:19:21 AM	SiCl4 post valve closed
1/25/2011	10:19:21 AM	Main Vac valve closed
1/25/2011	10:19:21 AM	Bubbler valve closed
1/25/2011	10:19:21 AM	Bypass valve opened
1/25/2011	10:19:21 AM	Helium MFC set to  0.000000
1/25/2011	10:19:21 AM	H2 MFC set to  0.000000
1/25/2011	10:19:21 AM	BCl3 MFC set to  0.000000
1/25/2011	10:19:21 AM	PHl3 MFC set to  0.000000
1/25/2011	10:19:21 AM	SiCl4 MFC set to  0.000000
1/25/2011	10:19:21 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	10:19:21 AM	Tube furnace set to 0
1/25/2011	10:19:44 AM	Helium valve closed
1/25/2011	10:19:44 AM	H2 valve closed
1/25/2011	10:19:44 AM	BCl3 valve closed
1/25/2011	10:19:44 AM	PH3 valve closed
1/25/2011	10:19:44 AM	SiCl4 pre valve closed
1/25/2011	10:19:44 AM	SiCl4 post valve closed
1/25/2011	10:19:44 AM	Bubbler valve closed
1/25/2011	10:19:44 AM	Main Vac valve opened
1/25/2011	10:19:44 AM	Bypass valve opened
1/25/2011	10:19:44 AM	Helium MFC set to  0.000000
1/25/2011	10:19:44 AM	H2 MFC set to  0.000000
1/25/2011	10:19:44 AM	BCl3 MFC set to  0.000000
1/25/2011	10:19:44 AM	PHl3 MFC set to  0.000000
1/25/2011	10:19:44 AM	SiCl4 MFC set to  0.000000
1/25/2011	10:19:44 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	10:19:44 AM	Tube furnace set to 0
1/25/2011	10:19:45 AM	Run finished at 10:19 AM
1/25/2011	10:19:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/25/2011	10:43:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/25/2011	10:43:06 AM	Recipe started at 10:43 AM
1/25/2011	10:43:06 AM	H2 valve closed
1/25/2011	10:43:06 AM	BCl3 valve closed
1/25/2011	10:43:06 AM	PH3 valve closed
1/25/2011	10:43:06 AM	SiCl4 pre valve closed
1/25/2011	10:43:06 AM	SiCl4 post valve closed
1/25/2011	10:43:06 AM	Main Vac valve closed
1/25/2011	10:43:06 AM	Bypass valve closed
1/25/2011	10:43:06 AM	Bubbler valve closed
1/25/2011	10:43:06 AM	Helium valve opened
1/25/2011	10:43:06 AM	Helium MFC set to  500.000000
1/25/2011	10:43:06 AM	H2 MFC set to  0.000000
1/25/2011	10:43:06 AM	BCl3 MFC set to  0.000000
1/25/2011	10:43:06 AM	PHl3 MFC set to  0.000000
1/25/2011	10:43:06 AM	SiCl4 MFC set to  0.000000
1/25/2011	10:43:06 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	10:43:07 AM	Tube furnace set to 0
1/25/2011	10:44:28 AM	Helium valve closed
1/25/2011	10:44:28 AM	H2 valve closed
1/25/2011	10:44:28 AM	BCl3 valve closed
1/25/2011	10:44:28 AM	PH3 valve closed
1/25/2011	10:44:28 AM	SiCl4 pre valve closed
1/25/2011	10:44:28 AM	SiCl4 post valve closed
1/25/2011	10:44:28 AM	Main Vac valve closed
1/25/2011	10:44:28 AM	Bypass valve closed
1/25/2011	10:44:28 AM	Bubbler valve closed
1/25/2011	10:44:28 AM	Helium MFC set to  0.000000
1/25/2011	10:44:28 AM	H2 MFC set to  0.000000
1/25/2011	10:44:28 AM	BCl3 MFC set to  0.000000
1/25/2011	10:44:28 AM	PHl3 MFC set to  0.000000
1/25/2011	10:44:28 AM	SiCl4 MFC set to  0.000000
1/25/2011	10:44:28 AM	Bypass solenoid MFC set to  0.000000
1/25/2011	10:44:28 AM	Tube furnace set to 0
1/25/2011	10:44:28 AM	Run finished at 10:44 AM
1/25/2011	10:44:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/25/2011	5:43:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/25/2011	5:43:33 PM	Recipe started at 5:43 PM
1/25/2011	5:43:33 PM	Helium valve closed
1/25/2011	5:43:33 PM	H2 valve closed
1/25/2011	5:43:33 PM	BCl3 valve closed
1/25/2011	5:43:33 PM	PH3 valve closed
1/25/2011	5:43:33 PM	SiCl4 pre valve closed
1/25/2011	5:43:33 PM	SiCl4 post valve closed
1/25/2011	5:43:33 PM	Main Vac valve closed
1/25/2011	5:43:33 PM	Bubbler valve closed
1/25/2011	5:43:33 PM	Bypass valve opened
1/25/2011	5:43:33 PM	Helium MFC set to  0.000000
1/25/2011	5:43:33 PM	H2 MFC set to  0.000000
1/25/2011	5:43:33 PM	BCl3 MFC set to  0.000000
1/25/2011	5:43:33 PM	PHl3 MFC set to  0.000000
1/25/2011	5:43:33 PM	SiCl4 MFC set to  0.000000
1/25/2011	5:43:33 PM	Bypass solenoid MFC set to  0.000000
1/25/2011	5:43:33 PM	Tube furnace set to 0
1/25/2011	5:44:10 PM	Helium valve closed
1/25/2011	5:44:10 PM	H2 valve closed
1/25/2011	5:44:10 PM	BCl3 valve closed
1/25/2011	5:44:10 PM	PH3 valve closed
1/25/2011	5:44:10 PM	SiCl4 pre valve closed
1/25/2011	5:44:10 PM	SiCl4 post valve closed
1/25/2011	5:44:10 PM	Bubbler valve closed
1/25/2011	5:44:10 PM	Main Vac valve opened
1/25/2011	5:44:10 PM	Bypass valve opened
1/25/2011	5:44:10 PM	Helium MFC set to  0.000000
1/25/2011	5:44:10 PM	H2 MFC set to  0.000000
1/25/2011	5:44:10 PM	BCl3 MFC set to  0.000000
1/25/2011	5:44:10 PM	PHl3 MFC set to  0.000000
1/25/2011	5:44:10 PM	SiCl4 MFC set to  0.000000
1/25/2011	5:44:10 PM	Bypass solenoid MFC set to  0.000000
1/25/2011	5:44:10 PM	Tube furnace set to 0
1/25/2011	5:44:10 PM	Run finished at 5:44 PM
1/25/2011	5:44:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
